JPH0533014Y2 - - Google Patents

Info

Publication number
JPH0533014Y2
JPH0533014Y2 JP1986202813U JP20281386U JPH0533014Y2 JP H0533014 Y2 JPH0533014 Y2 JP H0533014Y2 JP 1986202813 U JP1986202813 U JP 1986202813U JP 20281386 U JP20281386 U JP 20281386U JP H0533014 Y2 JPH0533014 Y2 JP H0533014Y2
Authority
JP
Japan
Prior art keywords
wafer
support
groove
width
surface portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986202813U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63105337U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986202813U priority Critical patent/JPH0533014Y2/ja
Publication of JPS63105337U publication Critical patent/JPS63105337U/ja
Application granted granted Critical
Publication of JPH0533014Y2 publication Critical patent/JPH0533014Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1986202813U 1986-12-25 1986-12-25 Expired - Lifetime JPH0533014Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986202813U JPH0533014Y2 (en]) 1986-12-25 1986-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986202813U JPH0533014Y2 (en]) 1986-12-25 1986-12-25

Publications (2)

Publication Number Publication Date
JPS63105337U JPS63105337U (en]) 1988-07-08
JPH0533014Y2 true JPH0533014Y2 (en]) 1993-08-23

Family

ID=31167548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986202813U Expired - Lifetime JPH0533014Y2 (en]) 1986-12-25 1986-12-25

Country Status (1)

Country Link
JP (1) JPH0533014Y2 (en])

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970334U (ja) * 1982-11-01 1984-05-12 株式会社テクニスコ 拡散治具
JPS59111040U (ja) * 1983-01-17 1984-07-26 日本電気ホームエレクトロニクス株式会社 半導体製造用治具
JPS59149631U (ja) * 1983-03-24 1984-10-06 富士電機株式会社 シリコンウエ−ハの保持具
JPS61251144A (ja) * 1985-04-30 1986-11-08 Toshiba Corp ウエハ載置用ボ−ト

Also Published As

Publication number Publication date
JPS63105337U (en]) 1988-07-08

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